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The growth of ultra-thin amorphous WGex films on Si by the GeH4 reduction of WF6

✍ Scribed by G.J. Leusink; T.G.M. Oosterlaken; C.A. van der Jeugd; G.C.A.M. Janssen; S. Radelaar


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
463 KB
Volume
53
Category
Article
ISSN
0169-4332

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