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Development of the structure of thin SiO2 films during thermal growth on Si substrate

✍ Scribed by I.P. Lisovskii; V.G. Litovchenko; V.V. Khatko


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
365 KB
Volume
22
Category
Article
ISSN
0167-9317

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