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On the structure of thin plasma-treated thermal SiO2 films

✍ Scribed by Dr. L. I. Popova; Dr. E. D. Atanassova; Dr. S. K. Peneva; Dr. E. A. Tcukeva


Publisher
John Wiley and Sons
Year
1988
Tongue
English
Weight
656 KB
Volume
23
Category
Article
ISSN
0232-1300

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