✦ LIBER ✦

Plasma nitridation of thin SiO2 films: AES, ELS and IR study

✍ Scribed by E.D. Atanassova; L.I. Popova

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

IR study of plasma-nitrided thermal SiO2

✍ E.D. Atanassova; L.I. Popova; D.I. Kolev 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 594 KB

Constructive versus destructive effects

✍ A. Glachant 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 806 KB

IR and dielectric studies of plasma-poly

✍ O. Islam; A.H. Bhuiyan; S. Ahmed 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 318 KB

Low temperature plasma nitridation of th

✍ E. Atanassova; J. Kassabov; E. Goranova 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 984 KB

Slow ramp voltage technique for investig

✍ G. Slavcheva 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 576 KB

Stability of plasma-deposited SiO2 films

✍ H. Gokan; A. Morimoto; M. Murahata 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 462 KB