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The growth kinetics and optical properties of films deposited in methane glow discharge

โœ Scribed by S. M. Barinov, V. I. Svettsov, A. M. Efremov


Book ID
114989104
Publisher
SP MAIK Nauka/Interperiodica
Year
2012
Tongue
English
Weight
308 KB
Volume
46
Category
Article
ISSN
0018-1439

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