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Substrate temperature dependence of the growth kinetics and opto-electronic properties of a-Si:H films deposited by RF glow discharge

✍ Scribed by P.Roca i Cabarrocas; J.Z. Liu; H.R. Park; A. Maruyama; S. Wagner


Book ID
115986653
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
215 KB
Volume
114
Category
Article
ISSN
0022-3093

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