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The Growth and Characterization of Very Thin Silicon Dioxide Films

โœ Scribed by Adams, A. C.


Book ID
125422499
Publisher
The Electrochemical Society
Year
1980
Tongue
English
Weight
873 KB
Volume
127
Category
Article
ISSN
0013-4651

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The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel