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The fabrication of molybdenum evaporation masks by scribing and etching

✍ Scribed by C.N. Potter


Publisher
Elsevier Science
Year
1966
Tongue
English
Weight
183 KB
Volume
9
Category
Article
ISSN
0038-1101

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Cost-effective fabrication of a phase ma
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## Abstract A simple and cost‐effective method to manufacture a phase mask with high diffraction efficiency for deep UV application is proposed. The deep rectangular grating fabricated by using laser interference is etched directly into a fused silica substrate, instead of the dielectric coating on