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Fabrication of metallic nanocones by induced deposition of etch masks and ion milling

✍ Scribed by M. Fleischer; A. Weber-Bargioni; S. Cabrini; D.P. Kern

Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
527 KB
Volume
88
Category
Article
ISSN
0167-9317

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Refractive microlenses are formed in semiconductor materials by transfer of a lens-like shape of reflowed erodable polyimide mask into the substrate by reactive ion etching. Simultaneous monitoring of the etch rates of the mask material and the semiconductor results in precise control of the lens ra