✦ LIBER ✦

The fabrication of high quality silicon junction detectors by low energy ion implantation

✍ Scribed by Kalbitzer, S. ;Bader, R. ;Herzer, H. ;Bethge, K.

Publisher: Springer-Verlag
Year: 1967
Weight: 96 KB
Volume: 203
Category: Article
ISSN: 0044-3328
DOI: 10.1007/bf01326065

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The application of high energy ion impla

The application of high energy ion implantation for silicon radiation detectors

✍ J. von Borany; B. Schmidt; R. Grötzschel 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 503 KB

Ge nano-layer fabricated by high-fluence

Ge nano-layer fabricated by high-fluence low-energy ion implantation

✍ Tiecheng Lu; Shaobo Dun; Qiang Hu; Songbao Zhang; Zhu An; Yanmin Duan; Sha Zhu; 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 328 KB

Investigation of avalanche silicon detec

Investigation of avalanche silicon detectors for low energy single ion implantation applications

✍ Changyi Yang; David Jamieson 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 281 KB

Fabrication of nanocrystal memories by u

Fabrication of nanocrystal memories by ultra low energy ion implantation

✍ N. Cherkashin; C. Bonafos; H. Coffin; M. Carrada; S. Schamm; G. Ben Assayag; D. 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 267 KB

The fabrication of radial position sensi

The fabrication of radial position sensitive detectors by ion implantation

✍ A. Feuerstein; S. Kalbitzer 📂 Article 📅 1973 🏛 Elsevier Science ⚖ 66 KB

Fabrication of MSM detector structures o

Fabrication of MSM detector structures on silicon by focused ion beam implantation

✍ J. Teichert; L. Bischoff; S. Hausmann 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 239 KB

We report the fabncation of metal-semiconductor-metal (MSM) photo detectors on silicon substrates with CoSi2 electrodes. The electrode patterns have been formed by ion beam synthesis applying maskless implantation with a cobalt focused ion beam. Implantation has been carried out with the substrate a