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Ge nano-layer fabricated by high-fluence low-energy ion implantation

✍ Scribed by Tiecheng Lu; Shaobo Dun; Qiang Hu; Songbao Zhang; Zhu An; Yanmin Duan; Sha Zhu; Qiangmin Wei; Lumin Wang

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 328 KB
Volume: 250
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2006.04.105

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