๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

The evolution of optical and electrical properties of low-k dielectrics under bias stress

โœ Scribed by J.M. Atkin; E. Cartier; T.M. Shaw; J.R. Lloyd; R.B. Laibowitz; T.F. Heinz

Book ID
104052323
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
463 KB
Volume
86
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Optical, electrical and structural prope
Optical, electrical and structural properties of spin-on MSQ low-k dielectrics over a wide temperature range
โœ N. Ahner; S.E. Schulz; F. Blaschta; M. Rennau ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 619 KB

Looking onto application of low-k and ultra low-k materials within FEOL, high temperature load is one of the major challenges. But also temperature ranges below standard curing conditions are of special interest, e.g. for integration of transparent low-k materials into optical devices due to their s