✦ LIBER ✦
Direct sub-100-nm patterning of an organic low-k dielectric for electrical and optical interconnects
✍ Scribed by Jeffrey M. Catchmark; Guy P. Lavallee; Michael Rogosky; Youngchul Lee
- Book ID
- 107453477
- Publisher
- Springer US
- Year
- 2005
- Tongue
- English
- Weight
- 92 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0361-5235
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