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The energy distributions of atoms sputtered from HfC

✍ Scribed by Marek Szymoński


Book ID
107985873
Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
195 KB
Volume
82
Category
Article
ISSN
0375-9601

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The energy and angular distributions of Ni and Al atoms sputtered from Ni 3 Al(100) by 8 keV Ar have been measured using multiphoton resonance ionization detection. The Al atoms, which originate entirely from the top atomic layer of Ni 3 Al(100), are predominantly sputtered along close packed <110>