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Energy distributions of atoms sputtered from polycrystalline surfaces

✍ Scribed by Barbara J. Garrison


Book ID
113277527
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
360 KB
Volume
17
Category
Article
ISSN
0168-583X

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The energy and angular distributions of Ni and Al atoms sputtered from Ni 3 Al(100) by 8 keV Ar have been measured using multiphoton resonance ionization detection. The Al atoms, which originate entirely from the top atomic layer of Ni 3 Al(100), are predominantly sputtered along close packed <110>