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Energy distributions of neutral atoms and molecules sputtered from polycrystalline silver

✍ Scribed by F. Bernhardt; H. Oechsner; E. Stumpe

Publisher
Elsevier Science
Year
1976
Weight
508 KB
Volume
132
Category
Article
ISSN
0029-554X

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The energy and angular distributions of Ni and Al atoms sputtered from Ni 3 Al(100) by 8 keV Ar have been measured using multiphoton resonance ionization detection. The Al atoms, which originate entirely from the top atomic layer of Ni 3 Al(100), are predominantly sputtered along close packed <110>