Angle and energy distributions of neutral atoms sputtered from Ni3Al(100)

✍ Scribed by Bruce V. King; C. Zimmermann; Donald E. Riederer; Scott W. Rosencrance; Barbara J. Garrison; Nicholas Winograd

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 183 KB
• Volume: 12
• Category: Article
• ISSN: 0951-4198
• DOI: 10.1002/(sici)1097-0231(19980930)12:18<1236::aid-rcm318>3.0.co;2-7

✦ Synopsis

The energy and angular distributions of Ni and Al atoms sputtered from Ni 3 Al(100) by 8 keV Ar have been measured using multiphoton resonance ionization detection. The Al atoms, which originate entirely from the top atomic layer of Ni 3 Al(100), are predominantly sputtered along close packed <110> directions. On the other hand the sputtered Ni flux, which arises from both the first and second layers, has a large component normal to the surface. Molecular dynamics computer simulations agree well with experimental results and suggest that the normal emission of Ni atoms arises primarily from second-layer atoms.