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The electrical properties of resistive and dielectric thin films prepared by reactive sputtering from a tantalum-titanium composite target

✍ Scribed by T. Umezawa; S. Yajima; K. Matsumoto


Book ID
107862518
Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
337 KB
Volume
52
Category
Article
ISSN
0040-6090

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