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The effects of Ta on the formation of Ni-silicide in Ni0.95xTax0.05/Si systems

✍ Scribed by Dongwon Lee; Kihoon Do; Dae-Hong Ko; Siyoung Choi; Ja-Hum Ku; Cheol-Woong Yang

Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
265 KB
Volume
114-115
Category
Article
ISSN
0921-5107

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