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The effects of deposition variables on deposition rate in the chemical vapour deposition of silicon nitride

✍ Scribed by Kyoung-Soo Yi; Ji-Bum Kim; Kwang-Joon Kim; John S. Chun

Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
421 KB
Volume
155
Category
Article
ISSN
0040-6090

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