✦ LIBER ✦

The effects of collimation on intrinsic stress in sputter-deposited metallic thin films

✍ Scribed by T. Janacek; D. Liu; S.K. Dew; M.J. Brett; T.J. Smy

Book ID: 107864504
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 430 KB
Volume: 253
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(94)90350-6

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Measurements of the intrinsic stress in

Measurements of the intrinsic stress in thin metal films

✍ R. Abermann 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 415 KB

Note on the origin of intrinsic stresses

Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering

✍ F.M. D'Heurle; J.M.E. Harper 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 804 KB

On the intrinsic stress in thin chromium

On the intrinsic stress in thin chromium films

✍ M. Janda 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 672 KB

Effect of impurities on intrinsic stress

Effect of impurities on intrinsic stress in thin ni films

📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 170 KB

Cr, Ti, Hf, Zr, Co, Ta, I'd, and Pt. The AI-Cr system was investigated in some detail using a conductance method and nuclear backscattering for reaction-rate measurements. The compounds CrAl, and Cr2AI,, were identified and their growth was found to be diffusion controlled. The temperature dependenc

Influence of Annealing on the Residual S

Influence of Annealing on the Residual Stress in Sputter-Deposited Platinum Films

✍ M. Härting; T.P. Ntsoane; R. Bucher 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 81 KB 👁 2 views

The deposition rate of metallic thin fil

The deposition rate of metallic thin films in the reactive sputtering process

✍ Tetsuya Abe; Toshiro Yamashina 📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 389 KB