Nanovoid formation by change in amorphou
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M. Tane; S. Nakano; R. Nakamura; H. Ogi; M. Ishimaru; H. Kimizuka; H. Nakajima
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Article
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2011
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Elsevier Science
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English
β 797 KB
The formation mechanism of a high density of nanovoids by annealing amorphous Al 2 O 3 thin films prepared by an electron beam deposition method was investigated. Transmission electron microscopy observations revealed that nanovoids $1-2 nm in size were formed by annealing amorphous Al 2 O 3 thin fi