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The effect of thermal annealing on the properties of thin alumina films prepared by low pressure metal-organic chemical vapour deposition

โœ Scribed by V.A.C. Haanappel; D. v.d. Vendel; H.D. van Corbach; T. Fransen; P.J. Gellings


Book ID
107864875
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
615 KB
Volume
256
Category
Article
ISSN
0040-6090

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