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Properties of alumina films prepared by low-pressure metal-organic chemical vapour deposition

โœ Scribed by V.A.C. Haanappel; H.D. van Corbach; T. Fransen; P.J. Gellings


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
685 KB
Volume
72
Category
Article
ISSN
0257-8972

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