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Properties of alumina films prepared by metal-organic chemical vapour deposition at atmospheric pressure in the presence of small amounts of water

✍ Scribed by V.A.C. Haanappel; J.B. Rem; H.D. van Corbach; T. Fransen; P.J. Gellings

Book ID: 107930341
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 1006 KB
Volume: 72
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(94)02327-m

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