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The effect of temperature on the structure of tantalum nitride (TaN) thin films deposited by DC plasma

✍ Scribed by M. R. Hantehzadeh; S. H. Mortazavi; S. Faryadras; M. Ghoranneviss

Publisher
Springer
Year
2011
Tongue
English
Weight
499 KB
Volume
31
Category
Article
ISSN
0164-0313

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