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The effect of substrate temperature on HW-CVD deposited a-SiGe:H films

โœ Scribed by S.R. Jadkar; Jaydeep V. Sali; S.T. Kshirsagar; M.G. Takwale

Book ID
117145620
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
128 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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