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The effect of processing parameters on amorphous carbon nitride layer properties

✍ Scribed by Rusop, M.; Soga, T.; Jimbo, T.

Book ID: 122527836
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 851 KB
Volume: 13
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2004.06.024

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