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Properties of amorphous carbon nitride a-CNx films prepared by the layer-by-layer method

✍ Scribed by Katsuno, T; Nitta, S

Book ID: 123566328
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 103 KB
Volume: 12
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(03)00316-9

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