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Preparation of amorphous carbon films by layer-by-layer hydrogen plasma annealing method and their luminescence properties

✍ Scribed by Xiaohui Huang; Jun Xu; Wei Li; Kunji Chen


Book ID
108388519
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
110 KB
Volume
422
Category
Article
ISSN
0040-6090

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## Amorphous hydrogenated carbon films were prepared by plasma assisted CVD method. Their de conductivity was studied as a function of temperature in the range of 300 K to 10 K. films were then subjected to high energy (170 MeVI ion irradiation. After irradiation a marked change was observed in th