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Preparation and properties of amorphous carbon oxy-nitride films made by the layer-by-layer method

✍ Scribed by Naruse, Yohko; Nitta, Shoji

Book ID: 122566977
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 111 KB
Volume: 11
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(02)00004-3

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