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The effect of oxygen on the interfacial reactions of Cu/TaNx/Si multilayers

✍ Scribed by Kai-Min Yin; Li Chang; Fu-Rong Chen; Ji-Jung Kai

Book ID
114192638
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
922 KB
Volume
71
Category
Article
ISSN
0254-0584

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πŸ“œ SIMILAR VOLUMES

Effect of oxygen on the reactions in Si/
Effect of oxygen on the reactions in Si/Ta/Cu and Si/TaC/Cu systems
✍ T Laurila; K Zeng; J Molarius; T Riekkinen; I Suni; J.K Kivilahti πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 613 KB

The effect of oxygen on the reactions in the Si / Ta / Cu and Si / TaC / Cu metallization systems was investigated by utilizing the assessed Ta-O binary and the evaluated ternary Ta-C-O phase diagrams together with detailed transmission electron microscopy (TEM) and secondary ion mass spectrometry a