๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

The effect of charged particles when preparing ZnO thin film by ion beam sputtering deposition

โœ Scribed by Yoshihiko Suzuki; Tsutom Yotsuya; Katsumi Takiguchi; Masaaki Yoshitake; Soichi Ogawa

Book ID
107925686
Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
262 KB
Volume
33-34
Category
Article
ISSN
0169-4332

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Characteristics of ZnO thin film deposit
Characteristics of ZnO thin film deposited by ion beam sputter
โœ Hung-Yin Tsai ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 882 KB

Zinc oxide (ZnO) is extensively studied because of its potential applications in various fields, such as surface acoustic wave (SAW) devices, solar cells, light emitting diodes (LEDs) and laser systems. The stoichiometric ZnO films are electrical insulation and have high piezoelectric properties, wh