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Effect of substrate temperature on residual stress of ZnO thin films prepared by ion beam deposition

โœ Scribed by Ju-Won Jeon; Myoung Kim; Lee-Woon Jang; J. L. Hoffman; Nam Soo Kim; In-Hwan Lee

Book ID
107702345
Publisher
The Korean Institute of Metals and Materials
Year
2012
Tongue
English
Weight
628 KB
Volume
8
Category
Article
ISSN
1738-8090

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Zinc oxide (ZnO) is extensively studied because of its potential applications in various fields, such as surface acoustic wave (SAW) devices, solar cells, light emitting diodes (LEDs) and laser systems. The stoichiometric ZnO films are electrical insulation and have high piezoelectric properties, wh