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Reduction of residual stress for ZnO/Al thin films on glass substrate prepared by radio frequency magnetron sputtering

✍ Scribed by K Sakaguchi; S Iwasa; Y Yoshino

Book ID: 108390467
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 409 KB
Volume: 51
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(98)00273-5

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