Epitaxial growth of diamond-like films o
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J.A. Martin-Gago; L. Vazquez; P. Bernard; S. Ferrer; F. Comin
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Article
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1992
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Elsevier Science
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English
β 254 KB
Carbon films of few atomic layers in thickness were grown on Si(100) substrates in an ultrahigh vacuum environment by pulsed-laser evaporation of graphite targets. Auger studies of the growth shows it to be layer by layer. It was found that the first two layers deposited, which wet the silicon surfa