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Growth of yttria-stabilized cubic zirconia films on GaAs (100) by pulsed laser evaporation

✍ Scribed by Murray, P.Terrence; Wolf, J.D.; Mescher, J.A.; Grant, J.T.; McDevitt, N.T.

Book ID
123507519
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
477 KB
Volume
5
Category
Article
ISSN
0167-577X

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Carbon films of few atomic layers in thickness were grown on Si(100) substrates in an ultrahigh vacuum environment by pulsed-laser evaporation of graphite targets. Auger studies of the growth shows it to be layer by layer. It was found that the first two layers deposited, which wet the silicon surfa