Carbon films of few atomic layers in thickness were grown on Si(100) substrates in an ultrahigh vacuum environment by pulsed-laser evaporation of graphite targets. Auger studies of the growth shows it to be layer by layer. It was found that the first two layers deposited, which wet the silicon surfa
✦ LIBER ✦
Epitaxial growth of crystalline, diamond-like films on Siâ(100) by laser ablation of graphite
✍ Scribed by Martin, J. A.; Vazquez, L.; Bernard, P.; Comin, F.; Ferrer, S.
- Book ID
- 120033593
- Publisher
- American Institute of Physics
- Year
- 1990
- Tongue
- English
- Weight
- 652 KB
- Volume
- 57
- Category
- Article
- ISSN
- 0003-6951
- DOI
- 10.1063/1.104053
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