Characteristics of diamond-like carbon films formed by a hybrid laser-plasma ablation of graphite

✍ Scribed by A. Rengan; J. Narayan; C. Jahnke; S. Bedge; J.L. Park; Ming Li

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 698 KB
• Volume: 15
• Category: Article
• ISSN: 0921-5107
• DOI: 10.1016/0921-5107(92)90023-3

✦ Synopsis

A novel laser-plasma techmque was used for the deposmon of &amond-hke carbon (DLC) films. The films were deposited m vacuum and in hydrogen amblents and the substrate temperature was vaned from 25 to 860 *C The DLC films were characterized by spectroscopic eilipsometry, Fourier transform infrared (FTIR) and Raman spectroscopy. The sp3/sp 2 fraction was estimated by using the effectwe number of valence electrons, n,fr, from n and k measurements The Raman disorder mode, or D band and the Raman-allowed graphltac mode, or G band, were deconvoluted using gaussmn funcaons. A correlauon was obtained between the sp 3 concentrauon, (C,p~), and the D band shift Specifically, an increase in C,p, resulted in a downward shift m the D band. The results are supported by FTIR measurements indicating a combmatmn of disordered and sp a phonon absorption bands for the films deposited m a vacuum ambient and stabd~zed sp 3 bonds for the films deposited m a hydrogen ambient