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The dry etching of TEOS oxide for poly-Si cantilevers in supercritical CO2

✍ Scribed by Jae Mok Jung; Eunjin Yoon; Euesang Lim; Byung Chun Choi; Sang-Yong Kim; Kwon Taek Lim

Book ID: 113797732
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 647 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.11.026

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