✦ LIBER ✦
Etchant Solutions for the Removal of Cu(0) in a Supercritical CO 2 -Based “Dry” Chemical Mechanical Planarization Process for Device Fabrication
✍ Scribed by Bessel, Carol A.; Denison, Ginger M.; DeSimone, Joseph M.; DeYoung, James; Gross, Stephen; Schauer, Cynthia K.; Visintin, Pamela M.
- Book ID
- 126165671
- Publisher
- American Chemical Society
- Year
- 2003
- Tongue
- English
- Weight
- 96 KB
- Volume
- 125
- Category
- Article
- ISSN
- 0002-7863
No coin nor oath required. For personal study only.