𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge

✍ Scribed by Bradley, J W; Bäcker, H; Aranda-Gonzalvo, Y; Kelly, P J; Arnell, R D


Book ID
121434511
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
313 KB
Volume
11
Category
Article
ISSN
0963-0252

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES