✦ LIBER ✦
Ion energy distribution change at the transition of power-coupling modes in an immersed-coil-type inductively coupled Ar discharge
✍ Scribed by D. Kang; D. Lee; K. Kim; J. Lee; J. Joo
- Book ID
- 125893660
- Publisher
- American Institute of Physics
- Year
- 2004
- Tongue
- English
- Weight
- 333 KB
- Volume
- 84
- Category
- Article
- ISSN
- 0003-6951
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