Comparison of ion energies and fluxes at the substrate during magnetron sputtering of ZnO : Al for dc and rf discharges

✍ Scribed by Welzel, Thomas; Ellmer, Klaus

• Book ID: 121343813
• Publisher: Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 416 KB
• Volume: 46
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/46/31/315202