✦ LIBER ✦
The mechanisms of negative oxygen ion formation from Al-doped ZnO target and the improvements in electrical and optical properties of thin films using off-axis dc magnetron sputtering at low temperature
✍ Scribed by Nguyen, Huu Chi; Trinh, Thanh Thuy; Le, Tran; Tran, Cao Vinh; Tran, Tuan; Park, Hyeongsik; Dao, Vinh Ai; Yi, Junsin
- Book ID
- 121439859
- Publisher
- Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 536 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0268-1242
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