Measurement of energy transfer at an isolated substrate in a pulsed dc magnetron discharge

✍ Scribed by Čada, M.; Bradley, J. W.; Clarke, G. C. B.; Kelly, P. J.

• Book ID: 121326934
• Publisher: American Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 518 KB
• Volume: 102
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2779287