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Ion energy measurement at the powered electrode in an rf discharge

✍ Scribed by Kuypers, A. D.; Hopman, H. J.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion energy distributions versus frequenc

✍ Abraham, I. C.; Woodworth, J. R.; Riley, M. E.; Miller, P. A.; Hamilton, T. W.; 📂 Article 📅 2002 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 568 KB

Tailored ion energy distributions at an

✍ Qin, X V; Ting, Y-H; Wendt, A E 📂 Article 📅 2010 🏛 Institute of Physics 🌐 English ⚖ 392 KB

Distribution of ion energies incident on

✍ Kushner, M. J. 📂 Article 📅 1985 🏛 American Institute of Physics 🌐 English ⚖ 963 KB

Ion energy distribution measurements in

✍ Gahan, D; Daniels, S; Hayden, C; Scullin, P; O'Sullivan, D; Pei, Y T; Hopkins, M 📂 Article 📅 2012 🏛 Institute of Physics 🌐 English ⚖ 923 KB

Ion energy distributions in SF6 plasmas

✍ F. Becker; I. W. Rangelow; R. Kassing 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 520 KB

Estimation of Ion Impact Energies and El

✍ Savas, S. E. 📂 Article 📅 1987 🏛 Cambridge University Press ⚖ 286 KB