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Estimation of Ion Impact Energies and Electrode Self-Bias Voltage in Capacitive RF Discharges

✍ Scribed by Savas, S. E.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Distribution of ion energies incident on

✍ Kushner, M. J. 📂 Article 📅 1985 🏛 American Institute of Physics 🌐 English ⚖ 963 KB

Separate control of the ion flux and ion

✍ Lafleur, T.; Delattre, P. A.; Johnson, E. V.; Booth, J. P. 📂 Article 📅 2012 🏛 American Institute of Physics 🌐 English ⚖ 565 KB