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The determination of high-dose implantation profiles using low-angle Rutherford backscattering

✍ Scribed by C.E. Christodoulides; W.A. Grant; J.S. Williams

Publisher
Elsevier Science
Year
1978
Weight
460 KB
Volume
149
Category
Article
ISSN
0029-554X

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📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 133 KB