✦ LIBER ✦
The depth profile of high-dose low-mass ions implanted into higher mass substrate by RBS analysis
✍ Scribed by Yin Shi-duan; Zhang Jing-ping; Gu Quan; Liu Shi-jie; Xie Bao-zhan; Ma Tie-liang; Qu Zhen-yuan
- Publisher
- Elsevier Science
- Year
- 1981
- Weight
- 196 KB
- Volume
- 191
- Category
- Article
- ISSN
- 0167-5087
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